Study of Edge-Emitting Micro-Laser with Deep-Etched Distributed Bragg Reflector
碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 101 === In this thesis, we use deep-etched Distributed Bragg reflector (DBR) to replace cleaved facet as the back side mirror. At first, we use wet etching method to fabrication ridge waveguide laser. Then, we use focus ion beam (FIB) to replace e-beam lithography,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27640733256205967773 |