Robust control for chamber pressure system with dead-time in MOCVD process
碩士 === 國立交通大學 === 機械工程系所 === 101 === Light Emitting Diode (LED) was extensively used in recent years due to its low power consumption and long-life time. In the LED-related industries, the Metal Organic Chemical Vapor Deposition (MOCVD) is in common used for deposition GaN films on sapphire substrat...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73821725552910268062 |