Optical and Structural Properties of ZnO Epitaxial Films Grown by Atomic Layer Deposition

博士 === 國立交通大學 === 光電工程學系 === 101 === We have successfully grown mono-crystalline ZnO epitaxial films on c-plane and m-plane sapphire substrates by using the atomic layer deposition. X-ray diffraction and transmission electron microscopy were employed to verify the structural properties of the ZnO t...

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Bibliographic Details
Main Authors: Yang, Song, 楊松
Other Authors: Hsieh, Wen-Feng
Format: Others
Language:en_US
Published: 2012
Online Access:http://ndltd.ncl.edu.tw/handle/cu4xyd