Optical and Structural Properties of ZnO Epitaxial Films Grown by Atomic Layer Deposition
博士 === 國立交通大學 === 光電工程學系 === 101 === We have successfully grown mono-crystalline ZnO epitaxial films on c-plane and m-plane sapphire substrates by using the atomic layer deposition. X-ray diffraction and transmission electron microscopy were employed to verify the structural properties of the ZnO t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2012
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Online Access: | http://ndltd.ncl.edu.tw/handle/cu4xyd |