Bandgap Narrowing in High Dopant Tin Oxide and Stress Measurement of Flexible ITO Thin Film
博士 === 國立中央大學 === 化學工程與材料工程學系 === 101 === In order to reduce the resistivity of tin oxide thin film, antimony-doped tin oxide (SnO2:Sb, ATO) films have been deposited on glass substrates using atmospheric pressure chemical vapor deposition (APCVD) method. The precursors are mixed with SnCl4, SbCl5 a...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/62285773020319299707 |