碩士 === 國立中央大學 === 化學工程與材料工程學系 === 101 === Abstract In the present study, we have demonstrated that arrays of vertically aligned Si nanowire were successfully produced on (001)Si substrates by using the PS nanosphere lithography combined with the Au-assisted selective chemical etching process. The d...

Full description

Bibliographic Details
Main Authors: Shang-jen Chang, 張尚仁
Other Authors: S. L. Cheng
Format: Others
Published: 2013
Online Access: