Fabrication and Analysis of Micro-pillared Quartz SAW Sensors
碩士 === 國立中央大學 === 機械工程學系 === 101 === Due to the high sensitivity, small size and high reliability, surface acoustic wave (SAW) device has been used as a sensor in many fields, such as gas sensors, liquid sensors, temperature sensors, and humidity sensors. It is also used as biomedicine and biologi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55259227145822812651 |