Fabrication of high density quartz pillars by electron beam lithography
碩士 === 國立中央大學 === 機械工程學系 === 101 === Quartz has good piezoelectricity and thermal stability. It has been widely used in electronics-industry, such as wave filters, microbalances, and oscillators. The nanopillars on quartz devices, may increase their performance due to the large surface area or produ...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57220897184574250040 |