Research on HIT Solar Cell using Radio-frequency Sputtering

碩士 === 國立中央大學 === 光電科學與工程學系 === 101 === The Characteristic of this research is used Ratio-Frequency Sputtering to fabricate HIT solar cell. The advantage of Ratio-Frequency Sputtering is cheap、 no pollution and low temperature than CVD manufacture. Sputtering exactly can match the manufacturing char...

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Bibliographic Details
Main Authors: Cheng Wu, 吳錚
Other Authors: Cheng-Chung Lee
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/62268576729297339267