自動化光學檢測應用在平面微致動元件的測定
碩士 === 國立彰化師範大學 === 機電工程學系 === 101 === This study developed an automatic optical inspection (AOI) technology for characterizing the motion amplitude and the vibration mode shape of in-plane micro-actuators. This study developed an automatic optical inspection (AOI) technology for characterizing the...
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| Format: | Others |
| Language: | zh-TW |
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2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23768073338426364842 |