The Study on Sol-gel Process Indium Gallium Zinc Oxide for Semiconductor Devices Application
碩士 === 國立彰化師範大學 === 光電科技研究所 === 101 === Abstract In this study, we prepared amorphous IGZO thin film by sol-gel process. The effects of Ga ratio and different annealing temperstures on physical, resistivity and optical properties for thin films were discussed. We found that the higher the proportion...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/32385437004174158862 |