The Study on Sol-gel Process Indium Gallium Zinc Oxide for Semiconductor Devices Application
碩士 === 國立彰化師範大學 === 光電科技研究所 === 101 === Abstract In this study, we prepared amorphous IGZO thin film by sol-gel process. The effects of Ga ratio and different annealing temperstures on physical, resistivity and optical properties for thin films were discussed. We found that the higher the proportion...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/32385437004174158862 |