Study on the Replication Accuracy of Polymer Hot Embossed Micro Channels in the Restricted Structure
碩士 === 桃園創新技術學院 === 材料應用科技研究所 === 101 === This thesis used micro molding via hot embossing was applied to both micro-featured fluidic platform and micro-featured fluidic platform in restricted structure used for Bio-Chip test.UV-LIGA like processes were used to prepare silicon based SU-8 photoresist...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85011081938440123411 |