Improving Particle Defect at TEOS Process of Semiconductor Manufacturing Technology
碩士 === 國立高雄海洋科技大學 === 微電子工程研究所 === 101 === Diffusion technology is widely used in the semiconductor industry and precision machinery, due to the use of diffusion technology products with high added value, the diffusion techniques and materials are widely used in research and practice, however, the y...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/58471274051793824631 |