Sputtered SiO2 nitrogen-surrounding Quantum Well Intermixing for Integration of Electroabsorption Modulators and Semiconductor Optical Amplifiers
碩士 === 國立中山大學 === 光電工程學系研究所 === 101 === In order to achieve the integration of photonic circuit, the spatial selectivity of bandgap tuning on a wafer is an important issue. In this work, a quantum well intermixing (QWI) technique by sputtering SiO2 and followed by rapid thermal annealing, called imp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/vhw82k |