Nitridation of (001) silicon single crystal under low oxygenatmosphere
碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 101 === The article is about the nitridation of (001) silicon single crystal under low oxygen atmosphere filled up of N2/H2 at high temperature. We characterized the composition and microstructure of Si3N4 via X-ray Diffractometer, Scanning Electron Microscopy, Tra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67590054274490122593 |