Study of ZnO epitaxial growth on the nitridated LiGaO2 substrate by chemical vaper deposition
碩士 === 國立中山大學 === 材料與光電科學學系研究所 === 101 === In this study, the level of tubular furnaces for chemical vapor deposition (Chemical Vapor Deposition, CVD), mainly to improve after LiGaO2 (A-LiGaO2) as the substrate for Zinc 2,4-pentanedionate monohydrate [Zn (C5H7O2) 2. H2O] as zinc precursor (precursor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3w9m4s |