Study of Sputtered P-N Homojunction Diodes of Polar n-Type on Nonpolar p-Type ZnO Thin Films
碩士 === 國立中山大學 === 物理學系研究所 === 101 === This thesis investigates thin-film P-N homojunction diodes made of c-textured ZnO deposited on a-oriented ZnO (a-ZnO) using r-Al2O3 as substrates. First, an a-ZnO epitaxial layer is grown on the r-oriented Al2O3 (r-Al2O3) substrate by RF sputtering. X-ray diffr...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/52994100626949376849 |