MOCVD equipment and TwinCAT controlling system for Zinc oxide thin films deposition
碩士 === 國立中山大學 === 機械與機電工程學系研究所 === 101 === In recent years, due to the rapid development of optoelectronic semiconductor material, it’s related research with applications is proposed, such as the main optoelectronic products of solar cells, flat-panel displays, light emitting devices and waveguide...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78450928127619143710 |