Enhanced metal-assisted chemical etching on silicon by localized surface plasma resonance
碩士 === 國立清華大學 === 光電工程研究所 === 101 === In recent years, since silicon nanostructures have many unique qualities, they have been applied to a wide variety of areas, including optoelectronic devices, biological, semiconductor optical devices, optical-sensing devices and solar cells. In this thesis, met...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69586029075337167541 |