Study of the Characteristics and Applications of Atmospheric Pressure Plasma Jets
博士 === 國立清華大學 === 物理系 === 101 === In study, we used atmospheric pressure plasma source (APPS) to study the effect of driving frequency on the characteristic of plasma, the effect of gas flow on the deposition process and plasma density distribution, deposition of organic silicon film, and controllin...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49797815433196921804 |