Development of 3D Epi-micromachining for Micro Optical Actuator
博士 === 國立清華大學 === 動力機械工程學系 === 101 === This study reports a novel micro electrostatic vertical comb-drive actuator (VCA) driven by the photovoltaic effect that results from incident light. The vertical comb electrodes have a pn junction structure. The VCA with pn-combs can be driven by the photovolt...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91632243413540084323 |