Effect of Nano Structure to Stress Concentration Caused by Chip Surface Defect

碩士 === 國立清華大學 === 動力機械工程學系 === 101 === Increasing uses of silicon chip in solar cell makes the thinning of silicon chip necessary. Surface defects are easily induced on chip during the thinning and machining processes. The stress concentration resulted from defects would be the source of crack and...

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Bibliographic Details
Main Authors: Shao, Yi-Kung, 邵翊綱
Other Authors: Yeh, Meng-Kao
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/20816001719518662644