Carbon Nanotube-based Hot-film and Temperature Sensors Assembled by Optically-Induced Dielectrophoresis

碩士 === 國立清華大學 === 動力機械工程學系 === 101 === Abstract Since their initial developments in the late 1980s, miniaturized sensors and actuators produced via microfabrication techniques have demonstrated compact footprint, high sensitivity, fast response time, and have thus garnered signification research att...

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Bibliographic Details
Main Authors: Hsu, Ming-Chang, 徐明樟
Other Authors: Lee, Gwo-Bin
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/60784782653269877493