Carbon Nanotube-based Hot-film and Temperature Sensors Assembled by Optically-Induced Dielectrophoresis
碩士 === 國立清華大學 === 動力機械工程學系 === 101 === Abstract Since their initial developments in the late 1980s, miniaturized sensors and actuators produced via microfabrication techniques have demonstrated compact footprint, high sensitivity, fast response time, and have thus garnered signification research att...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/60784782653269877493 |