Study of Microcrystalline Silicon Thin Film Deposition by 40.68 MHz In-Line PECVD and Plasma Emission Spectroscopy Analysis
碩士 === 國立清華大學 === 工程與系統科學系 === 101 === Abstract Thin-film solar cells are fabricated by low-cost production processes, and deposited on low-cost substrate like glass, stainless steel or plastics. Therefore, thin-film solar cells are an alternative to conventionally used wafer solar cells based on cr...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32511263171754467003 |