The Fabrication Process of MEMS Device Based on Single Crystal Silicon and Deep Etching — Fabricating a Comb-Drive Actuator Driven by Capacitively-Coupled-Power as an Example
博士 === 國立清華大學 === 奈米工程與微系統研究所 === 101 === Recently, Micro-Electro-Mechanical Systems (MEMS) have been increasingly used in consumer electrical products, due to their progress in fabrication process and device design. Following the trend, the work further improves the process and design, which use si...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/eq9rsc |