High-Aspect-Ratio Microstructures Fabricated by Backside Lithography and Their Application
博士 === 國立清華大學 === 奈米工程與微系統研究所 === 101 === Abstract UV-LIGA is a lithography process used for low-cost mass production of microstructures. However, the attenuation in intensity of UV light (wavelength 365 nm) easily generates microstructures with larger heads and smaller bottoms (the so-called “big...
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| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90582547549264675250 |