Design and Characterization of Mechanically-Coupled CMOS-MEMS Filters

碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 101 === This work reports on the design and characterization of a mechanically-coupled CMOS-MEMS filter centered at several MHz with a narrow bandwidth and reasonable insertion loss after filter termination performed in a 4-port network analyzer. To implement a band...

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Bibliographic Details
Main Authors: Chen, Chao-Yu, 陳昭瑜
Other Authors: 李昇憲
Format: Others
Language:zh-TW
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/41854077975762134204