Design and Characterization of Mechanically-Coupled CMOS-MEMS Filters
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 101 === This work reports on the design and characterization of a mechanically-coupled CMOS-MEMS filter centered at several MHz with a narrow bandwidth and reasonable insertion loss after filter termination performed in a 4-port network analyzer. To implement a band...
Main Authors: | Chen, Chao-Yu, 陳昭瑜 |
---|---|
Other Authors: | 李昇憲 |
Format: | Others |
Language: | zh-TW |
Published: |
2013
|
Online Access: | http://ndltd.ncl.edu.tw/handle/41854077975762134204 |
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