Micro-Raman Investigation of Thermal-Stress Reduction by Surface Nanostructures
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 101 === In this study we successfully to demonstrate the silver-nanoparticles-catalyzed chemical reaction wet-etching for commercialize, single-side polished, orientation with (100) face, and 4-inch with diameter silicon wafers with regular and around 1、2、3-μm unifo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09492204993988844965 |