Preparation of Porous Silica Low-k Films by Using Different Concentration of Structure Directing Agent TPAOH
碩士 === 國立臺灣大學 === 化學工程學研究所 === 101 === The syntheses of coating solutions with pure silica MFI-type zeolite for the preparation of porous low dielectric constant (low-k) films were reported in literatures. In our previous study, short hydrothermal process for producing coating solutions mainly conta...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15333586354640615486 |