Effects of Fe and Y2O3 Additions on the Nitridation Behavior of Reaction-Bonded Silicon Nitride and its Characteristic Bonding to Copper
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 101 === Because of economic feasibility, dimensions control and low processing temperature, the reaction-bonded silicon nitride (RBSN) process has received extensive attention. The microstructure and thermal conductivity of the reaction-bonded silicon nitride (RB...
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| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34898436822692824649 |