Characteristics and Barrier Appllication of Magnetron Sputtered Zr-Ti-Ni Thin Film Metallic Glass
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 101 === In this study 1μm-thick Zr46Ti26Ni28 thin film metallic glass was fabricated by radio frequency magnetron single target sputtering on Si (100) and AISI 420 stainless steel substrates. The as-deposited film was found to be fully amorphous with high glass tran...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91327689015776020062 |