Design and Development of Three-degree-of-freedom Piezo Scanner for Scanning Probe Microscope
碩士 === 國立臺灣大學 === 機械工程學研究所 === 101 === The progressive nano-scientific development requires highly accurate Three-degree-of-freedom metrology (3D-metrology) methods for resolving diverse nano-scale sample structures. A 3D-scanning microscope is mainly integrated with a 3D-scanner and special types o...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56858639634973119311 |