Design and Development of a 3-Axis Long Travel and High-speed Nano-scale Positioning System
碩士 === 國立臺灣大學 === 機械工程學研究所 === 101 === The scanning probe microscopy has been successfully used in many technological areas. For fulfilling diverse technological requirements, the high-speed and long-travel scanning function becomes an important development trend to investigate the sample surface va...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89527443539001867783 |