| Summary: | 碩士 === 國立臺灣大學 === 機械工程學研究所 === 101 === The scanning probe microscopy has been successfully used in many technological areas. For fulfilling diverse technological requirements, the high-speed and long-travel scanning function becomes an important development trend to investigate the sample surface variation in a large detecting range. The purpose of this thesis is to develop a three-axis positioning system for enhancing the high-speed and long-travel scanning function of the scanning probe microscopy (SPM). The piezoelectric stack is chosen as the actuator for achieving nano-scale actuation resolution, and the amplifying flexure structure is developed to increase its actuation stroke. Moreover, the parallel spring guide and the preload adjustment device are adopted to induce the stable contact between the actuator and the guiding stage. Because of its small size and high detection resolution, the HOE-pick up head is chosen as the position detection sensor in order to compactly integrated into the positioning system. Through theoretical and finite element analyses, the relationship between the design parameters, the static and dynamic performances of the actuation amplification and the spring guide are studied in detail to optimize the positioning system. The control algorithm and the man-machine interface of this positioning system are built up on the LabVIEW software platform, and the regulation of operation parameters and the data presentation can be carried out by using the computer.
The developed positioning system has a weight of 0.17 kg with the size of length 55 mm x width 55 mm x height 50 mm. It can achieve the maximum stroke of 63.2 μm on the X axis, 57.8 μm on the Y axis, and 9.7 μm on the Z axis. The positioning system had nonlinearity of 7.4%, 6.4%, and 7.9% and the positioning resolution of 6.2 nm, 5.6 nm, and 1.0 nm on the X, Y and Z axes, respectively. Moreover, their corresponding resonance frequency of the positioning system is approximately 1.12 kHz, 1.06 kHz, and 3.06 kHz. The overall performance, such as the actuation strokes on the X and Y axes, the resonances frequency and the weight, of this positioning system is superior to current available products.
|
|---|
