Microcrystalline Si thin film solar cells prepared through VHF- PECVD
碩士 === 國立臺灣科技大學 === 化學工程系 === 101 === In this work, hydrogenated microcrystalline silicon (μc-Si:H) films deposited through very high frequency plasma enhanced chemical vapor deposition (VHF- PECVD) were investigated. First of all deposition parameters such as total pressure, substrate temperature,...
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| Format: | Others |
| Language: | en_US |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69938836859483377585 |