Cladding Stress Engineering Study on Silicon Wire
碩士 === 國立臺灣科技大學 === 電子工程系 === 101 === In recent years, the multifunction from miniature silicon photonic and its CMOS compatible fabrication have gradually attracted a lot of attentions. To avoid the optical interconnection, the integrated photonic devices composed of different material layers becom...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/46323087426019356684 |