Development and application of non-contact immersion maskless lithography system using short wavelength light source
博士 === 國立臺灣科技大學 === 機械工程系 === 101 === The optical lithography process which was one of the most important optical processes was developed to produce the integrated circuit and micro electromechanical system components. The traditional optical lithography process could not produce small size componen...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/59470526941152276557 |