Analysis on Friction Force and Mechanical Properties of Polishing Pads for Polishing of Sapphire Wafers
碩士 === 國立臺灣科技大學 === 機械工程系 === 101 === The environmental protection issue has been arised recently and LED lighting for low carbon emissions and energy conserving has been rapidly developed. Mono-crystalline sapphire wafer as a deposited substrate for LED lighting has been studied popularly. However,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79282401923525629802 |