Analysis and Development of Lap for Mono-Crystalline Sapphire Wafer Lapping Process
碩士 === 國立臺灣科技大學 === 機械工程系 === 101 === Due to demand of mono-crystal sapphire wafers in solid-state illumination industry, sapphire wafer planarization process needs to be investigated to improve wafer production efficiency and quality. Diamond lapping is one critical process to reduce long polishing...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80708419159471059397 |