Simulation and analysis on down force and cutting force and distribution of temperature produced from plastic heat for cutting of V-shaped groove on single-crystal silicon by AFM probe
碩士 === 國立臺灣科技大學 === 機械工程系 === 101 === The paper develops a simulation model of three-dimensional quasi-steady molecular statics nanocutting to carry out simulation and analysis of nanocutting of V-shaped groove on single-crystal silicon (Si) for the 1st and 2nd passes by a conic cutting tool of AFM...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86053240709662559900 |