The Investigation of Characteristic and Reliability for FinFET with Different Device Dimension
碩士 === 國立高雄大學 === 電機工程學系碩士班 === 101 === A new structure called Fin Field-Effect Transistor (FinFET) is proposed to achieve continuous scaling down of MOSFET. In this thesis, the characteristic and reliability of FinFET are studied with different dimensions. It is found that the short channel effec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28716612132540925184 |