Apply TiO2 Nanostructures to Surface Acoustic Wave Ultraviolet Photodtectors
碩士 === 國立虎尾科技大學 === 電子工程系碩士班 === 101 === In this paper, by using RF magnetron sputter system prepared titanium dioxide thin films. In order to obtain high quality of titanium dioxide films, sputtering process by adjusting the gas ratio, the sputtering pressure and the annealing temperature of the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/hqq6kr |