Development of a Coplanar Platform with Locking-device
碩士 === 南台科技大學 === 機械工程系 === 101 === The main purpose of this study is to design a coplanar platform with locking-device. The platform is driven by a linear motor for a long stroke. A nano stage was utilized for fine-tuning of a short stroke and an optical encoder with a resolution of 50 nm was used...
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| Format: | Others |
| Language: | zh-TW |
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68096915064504967252 |