The Study on Aluminum Oxide Thin Film by Liquid Phase Deposition
碩士 === 亞洲大學 === 資訊工程學系碩士班 === 101 === In this study, aluminum oxide films were deposited on silicon wafer by liquid phase deposition with deposition solution aluminum sulfate and sodium bicarbonate. The pH value was controlled during the deposition. The deposition temperature and annealing conditio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82389322601373061565 |