Fault Classification for Semiconductor Manufacturing Process Using the Component-based Approaches

碩士 === 國立臺北科技大學 === 工業工程與管理系碩士班 === 101 === In the modern semiconductor industry, typically, the trace data acquired from production equipment (i.e., FD data) contains tons of information, posing a challenging task for fault detection and identification due to its sheer volume and data quality. In t...

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Bibliographic Details
Main Authors: Tsung-Hsien Chiu, 邱宗憲
Other Authors: 范書愷
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/8szz4g