Fault Classification for Semiconductor Manufacturing Process Using the Component-based Approaches
碩士 === 國立臺北科技大學 === 工業工程與管理系碩士班 === 101 === In the modern semiconductor industry, typically, the trace data acquired from production equipment (i.e., FD data) contains tons of information, posing a challenging task for fault detection and identification due to its sheer volume and data quality. In t...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2013
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Online Access: | http://ndltd.ncl.edu.tw/handle/8szz4g |