Development of frontside/backside-direction capacitive microphone base on CMOS-MEMS process
碩士 === 國立臺北科技大學 === 機電整合研究所 === 101 === CMOS-MEMS process can achieve miniaturization, low cost and mass production, because the CMOS-MEMS process can integrate general IC process and IC circuit to become Micro-Electro-Mechanical-System. This study provides a design way to combine two different micr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
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| Online Access: | http://ndltd.ncl.edu.tw/handle/wk92nu |