Real-time Monitoring Technology on the Condensable and Acid Molecular Contamination for 450 mm Wafer Carrier
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 101 === The airborne molecular contamination (AMC) control has become an important issue since smaller and smaller integrated circuit (IC) linewidth is used in semiconductor products. During the process of wafer storage and transportation in front opening unifie...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2013
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/dr5s83 |