Real-time Monitoring Technology on the Condensable and Acid Molecular Contamination for 450 mm Wafer Carrier

• Main Authors: Cheng-Wei Yang, 楊承偉
• Other Authors: 胡石政
• Format: Others
• Language: zh-TW
• Published: 2013
• Online Access: http://ndltd.ncl.edu.tw/handle/dr5s83

碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 101 === The airborne molecular contamination (AMC) control has become an important issue since smaller and smaller integrated circuit (IC) linewidth is used in semiconductor products. During the process of wafer storage and transportation in front opening unified pods (FOUP), any AMC may pollute the wafer and decrease the defect-free rate. The AMC inside a FOUP might be reminder from the previous manufacturing process or the cross-contamination between wafers. Therefore, if the real-time AMC concentration inside a FOUP can be monitored to evaluate the cleanliness, the polluted FOUP can be discarded for loading wafer and prevent the decrease of defect-free rate. Many AMC monitoring methodologies which were used in the past have their own limitations, including difficult real-time monitoring, poor sensitivity, poor accuracy, complex operation, often breakdown, and high maintenance cost. It is essential to make AMC monitoring fast and easy on the wafer storage and transportation in FOUPs. Automatic real-time monitoring and easy operation of sample collecting are examples but not limited to meet the demands of AMC monitoring on ppb or ppt level to assure the integrity of manufacturing process. This research aims to measure hydrogen fluoride and toluene particles as main AMC in semiconductor manufacturing. The Cavity Ring-Down Spectroscopy (CRDS) was used for measuring hydrogen fluoride particles while the photoionization detector (PID) monitoring system was used for measuring toluene and related organic contaminant. The results showed that both CRDS and PID were highly sensitive and could measure the pollution index rapidly. In addition, the recovery time for the monitor was short that the indicator went back to zero within 10 minutes. Compared with other methods of measurements, CRDS and PID could finish more FOUPs monitoring within the same time period.