A Study on the influence of SiNx thickness and Nano Mask on Anti-reflectivity of Tilted Sub-wavelength Structure

碩士 === 大同大學 === 光電工程研究所 === 101 === This research aims to investigate the useage of low cost nanometer ball's self assembly skills. Use the nanometer balls sperad over rough surface of pramidical sturctures with SiNx, it may form into a "Tilted Sub-wavelength Structure, TSWS" anti...

Full description

Bibliographic Details
Main Authors: Hsien-Chieh Lin, 林顯杰
Other Authors: Chiung-Wei Lin
Format: Others
Language:en_US
Published: 2013
Online Access:http://ndltd.ncl.edu.tw/handle/41704485985093876072